Achieving Peta-Ohm Resistance for Semi-Insulating 4H-SiC Devices by Atomic Layer Deposition
Yuying, Xi., Helios Y., Li., Guohui, Li., et al. (2024). "Achieving Peta-Ohm Resistance for Semi-Insulating 4H-SiC Devices by Atomic Layer Deposition." arXiv. 2407.10208.